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Cleanroom standards Class Maximum particles/m3 a FED STD 209E ≥0.1 μm ≥0.2 μm ≥0.3 μm ≥0.5 μm ≥1 μm ≥5 μm equivalent ISO 1 10b d d d d e ISO 2 100 24b 10b d d e ISO 3 1,000 237 102 35b d e Class 1 ISO ...